Tianniu Chen

Tianniu Chen received both his B.S. and M.S. degree in organic and supermolecular chemistry from Nanjing University, China. He then went on to receive his Ph.D. degree in organometallic/materials chemistry from the University of Tennessee (Knoxville), Tenn, USA, where he studied chemistry of high-oxidation-state groups V and VI complexes. Chen joined Advanced Technology Materials, Inc. (ATMI), in 2002, and started as a Research Scientist on discovering and developing novel deposition materials surrounding copper-based advanced interconnects for both logic and memory applications in semiconductor industry. He then went on to take a position of Senior Technologist at ATMI, where he led the efforts on developing novel cleaning formulations in wet processes for both semiconductor and photovoltaic applications. He currently holds a position of R&D Manager in chief technology officer’s office at ATMI, where he is developing green and sustainable technologies. Moreover, Chen has authored twelve issued patents, seventeen published patent applications, thirty-four peer-reviewed publications, and twenty-six conference proceedings/presentations.

Biography Updated on 27 January 2012

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