Tianniu Chen received both his B.S. and M.S. degree in organic and supermolecular chemistry from Nanjing University, China. He then went on to receive his Ph.D. degree in organometallic/materials chemistry from the University of Tennessee (Knoxville), Tenn, USA, where he studied chemistry of high-oxidation-state groups V and VI complexes. Chen joined Advanced Technology Materials, Inc. (ATMI), in 2002, and started as a Research Scientist on discovering and developing novel deposition materials surrounding copper-based advanced interconnects for both logic and memory applications in semiconductor industry. He then went on to take a position of Senior Technologist at ATMI, where he led the efforts on developing novel cleaning formulations in wet processes for both semiconductor and photovoltaic applications. He currently holds a position of R&D Manager in chief technology officer’s office at ATMI, where he is developing green and sustainable technologies. Moreover, Chen has authored twelve issued patents, seventeen published patent applications, thirty-four peer-reviewed publications, and twenty-six conference proceedings/presentations.
Biography Updated on 27 January 2012