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Joe Qin
Articles in Scholarly Journals [Incomplete List]
Recent developments in multivariable controller performance monitoring?
Journal of Process Control, vol. 17, no. 3, pp. 221–227, 2007
A Curve Fitting Method for Detecting Valve Stiction in Oscillating Control Loops
Industrial & Engineering Chemistry Research, vol. 46, no. 13, pp. 4549–4560, 2007
Multiblock Principal Component Analysis Based on a Combined Index for Semiconductor Fault Detection and Diagnosis
IEEE Transactions on Semiconductor Manufacturing, vol. 19, no. 2, pp. 159–172, 2006
Semiconductor manufacturing process control and monitoring: A fab-wide framework
Journal of Process Control, vol. 16, no. 3, pp. 179–191, 2006
Closed-loop subspace identification using the parity space?
Automatica, vol. 42, no. 2, pp. 315–320, 2006
An overview of subspace identification
Computers & Chemical Engineering, vol. 30, no. 10-12, pp. 1502–1513, 2006
Fault detection and diagnosis based on modified independent component analysis
AIChE Journal, vol. 52, no. 10, pp. 3501–3514, 2006
A novel subspace identification approach with enforced causal models?
Automatica, vol. 41, no. 12, pp. 2043–2053, 2005
Projection based MIMO control performance monitoring: II??measured disturbances and setpoint changes
Journal of Process Control, vol. 15, no. 1, pp. 89–102, 2005
Industrial & Engineering Chemistry Research, vol. 44, no. 7, pp. 2117–2124, 2005
Industrial & Engineering Chemistry Research, vol. 44, no. 8, pp. 2359–2368, 2005
A new fault diagnosis method using fault directions in Fisher discriminant analysis
AIChE Journal, vol. 51, no. 2, pp. 555–571, 2005
Recursive Least Squares Estimation for Run-to-Run Control With Metrology Delay and Its Application to STI Etch Process
IEEE Transactions on Semiconductor Manufacturing, vol. 18, no. 2, pp. 309–319, 2005
Closed-loop subspace identification: an orthogonal projection approach
Journal of Process Control, vol. 15, no. 1, pp. 53–66, 2005
Industrial & Engineering Chemistry Research, vol. 43, no. 7, pp. 1701–1710, 2004
A two-stage iterative learning control technique combined with real-time feedback for independent disturbance rejection*1
Automatica, vol. 40, no. 11, pp. 1913–1922, 2004
Adaptive generic model control for a class of nonlinear time-varying processes with input time delay
Journal of Process Control, vol. 14, no. 5, pp. 517–531, 2004
A strong tracking predictor for nonlinear processes with input time delay
Computers & Chemical Engineering, vol. 28, no. 12, pp. 2523–2540, 2004
Statistical process monitoring: basics and beyond
Journal of Chemometrics, vol. 17, no. 8-9, pp. 480–502, 2003
A survey of industrial model predictive control technology
Control Engineering Practice, vol. 11, no. 7, pp. 733–764, 2003
Computationally efficient modeling of wafer temperatures in a low-pressure chemical vapor deposition furnace
IEEE Transactions on Semiconductor Manufacturing, vol. 16, no. 2, pp. 342–350, 2003
Adaptive run-to-run control and monitoring for a rapid thermal processor
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, vol. 21, no. 1, p. 301, 2003
Projection based MIMO control performance monitoring: I—covariance monitoring in state space
Journal of Process Control, vol. 13, no. 8, pp. 739–757, 2003
A new subspace identification approach based on principal component analysis
Journal of Process Control, vol. 12, no. 8, pp. 841–855, 2002
On the selection of variables for qualitative modelling of dynamical systems
International Journal of General Systems, vol. 31, no. 5, pp. 435–467, 2002
Multivariate process monitoring and fault diagnosis by multi-scale PCA
Computers & Chemical Engineering, vol. 26, no. 9, pp. 1281–1293, 2002
On unifying multiblock analysis with application to decentralized process monitoring
Journal of Chemometrics, vol. 15, no. 9, pp. 715–742, 2001
Detection and identification of faulty sensors in dynamic processes
AIChE Journal, vol. 47, no. 7, pp. 1581–1593, 2001
Sensor validation and process fault diagnosis for FCC units under MPC feedback
Control Engineering Practice, vol. 9, no. 8, pp. 877–888, 2001
Consistent dynamic PCA based on errors-in-variables subspace identification
Journal of Process Control, vol. 11, no. 6, pp. 661–678, 2001
Error based criterion for on-line wavelet data compression
Journal of Process Control, vol. 11, no. 6, pp. 717–731, 2001
Plasma etching endpoint detection using multiple wavelengths for small open-area wafers
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, vol. 19, no. 1, p. 66, 2001
Determining the number of principal components for best reconstruction
Journal of Process Control, vol. 10, no. 2-3, pp. 245–250, 2000
Recursive PCA for adaptive process monitoring
Journal of Process Control, vol. 10, no. 5, pp. 471–486, 2000
Fault detection of plasma etchers using optical emission spectra
IEEE Transactions on Semiconductor Manufacturing, vol. 13, no. 3, pp. 374–385, 2000
On-line data compression and error analysis using wavelet technology
AIChE Journal, vol. 46, no. 1, pp. 119–132, 2000
Industrial & Engineering Chemistry Research, vol. 38, no. 11, pp. 4389–4401, 1999
Industrial & Engineering Chemistry Research, vol. 37, no. 3, pp. 1024–1032, 1998
Joint diagnosis of process and sensor faults using principal component analysis
Control Engineering Practice, vol. 6, no. 4, pp. 457–469, 1998
Subspace approach to multidimensional fault identification and reconstruction
AIChE Journal, vol. 44, no. 8, pp. 1813–1831, 1998
Control performance monitoring -- a review and assessment
Computers & Chemical Engineering, vol. 23, no. 2, pp. 173–186, 1998
Industrial & Engineering Chemistry Research, vol. 37, no. 6, pp. 2462–2468, 1998
A unified geometric approach to process and sensor fault identification and reconstruction: the unidimensional fault case
Computers & Chemical Engineering, vol. 22, no. 7-8, pp. 927–943, 1998
Recursive PLS algorithms for adaptive data modeling
Computers & Chemical Engineering, vol. 22, no. 4-5, pp. 503–514, 1998
An Interpolating Model Predictive Control Strategy with Application to a Waste Treatment Plant
Computers & Chemical Engineering, vol. 21, no. 1-2, pp. S881–S886, 1997
Interpolating optimizing process control
Journal of Process Control, vol. 7, no. 2, pp. 129–138, 1997
Industrial & Engineering Chemistry Research, vol. 36, no. 5, pp. 1675–1685, 1997
Nonlinear FIR modeling via a neural net PLS approach
Computers & Chemical Engineering, vol. 20, no. 2, pp. 147–159, 1996
Identification of faulty sensors using principal component analysis
AIChE Journal, vol. 42, no. 10, pp. 2797–2812, 1996
Use of principal component analysis for sensor fault identification
Computers & Chemical Engineering, vol. 20, pp. S713–S718, 1996
A multiregion fuzzy logic controller for nonlinear process control
IEEE Transactions on Fuzzy Systems, vol. 2, no. 1, pp. 74–81, 1994
Nonlinear PLS modeling using neural networks
Computers & Chemical Engineering, vol. 16, no. 4, pp. 379–391, 1992