Munirathna Padmanaban

AZ Electronic Materials, USA

Munirathna Padmanaban was born in Erukkambut village, Vellore District, India in 1958. He has received his Ph.D. degree (fiber science) from the Indian Institute of Technology, New Delhi in 1984 and his Dr.Eng. degree (polymers) from the Tokyo Institute of Technology, Tokyo, Japan in 1990. He was the Recipient of the Ministry of Education, Japan Award to conduct research in the polymeric materials from 1985 to 1990. Since 1980, he has been actively involved in the research and development of materials for synthetic fiber and semiconductor industries. He has held various positions at Hoechst Japan Limited, Clariant corporation, and AZ electronic materials USA corp. since 1990. He currently holds the position of a Senior R&D Manager at AZ Electronic Materials USA corp. His current interests include materials for semiconductor industry and is actively engaged in antireflective coatings and materials for double patterning and EUV lithography. He has published more than 100 papers and holds several patents. He has chaired and cochaired several international conference sessions. He is a Member of SPIE—the International Society for Optics and Photonics as well as ACS—the American Chemical Society.

Biography Updated on 14 April 2011

Scholarly Contributions [Data Provided by scopus]

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