Shun-ichiro Ohmi
Personal Home Page
http://www.titech.ac.jp/whoswho/Profiles/0010/0000355/prof_e.html
Articles in Scholarly Journals [Incomplete List]
- Thermal stability of Gd2O3/Si(100)
interfacial transition layer
Journal de Physique IV (Proceedings), vol. 132, no. 1, pp. 273–277, 2006 - Ultrathin HfOxNy Gate Insulator Formation by Electron Cyclotron Resonance Ar/N2 Plasma Nitridation of HfO2 Thin Films
IEICE Transactions on Electronics, vol. E89-C, no. 5, pp. 596–601, 2006 - Electrical properties of vacuum annealed LaO thin films grown by E-beam evaporation
Microelectronics Journal, vol. 36, no. 1, pp. 41–49, 2005 - Separation by Bonding Si Islands (SBSI) for Advanced CMOS LSI Applications
IEICE Transactions on Electronics, vol. E88-C, no. 4, pp. 656–661, 2005 -
Space-Charge-Limited Currents in La2O3 Thin Films Deposited by E-Beam Evaporation after Low Temperature Dry-Nitrogen Annealing
Japanese Journal of Applied Physics, vol. 44, no. No. 6A, pp. 4032–4042, 2005 - New method of Plasma doping with in-situ Helium pre-amorphization
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, vol. 237, no. 1-2, pp. 41–45, 2005 - Ultra shallow p/n junction formation by plasma doping (PD) and long pulse all solid-state laser annealing (ASLA) with selective absorption modulation
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, vol. 237, no. 1-2, pp. 58–61, 2005 - Separation by bonding Si Islands (SBSI) for LSI applications
Materials Science in Semiconductor Processing, vol. 8, no. 1-3, pp. 59–63, 2005 - Effects of low temperature annealing on the ultrathin LaO gate dielectric; comparison of post deposition annealing and post metallization annealing
Microelectronic Engineering, vol. 80, pp. 206–209, 2005 - Analysis of variation in leakage currents of Lanthana thin films
Solid-State Electronics, vol. 49, no. 5, pp. 825–833, 2005 -
Effect of Post-Metallization Annealing on Electrical Characteristics of La2O3 Gate Thin Films
Japanese Journal of Applied Physics, vol. 44, no. No. 2, pp. 1045–1051, 2005 -
Dry Etching of Cr2O3/Cr Stacked Film during Resist Ashing by Oxygen Plasma
Japanese Journal of Applied Physics, vol. 44, no. No. 1A, pp. 114–117, 2005 - Electrical Characteristics for Lu[sub 2]O[sub 3] Thin Films Fabricated by E-Beam Deposition Method
Journal of The Electrochemical Society, vol. 151, no. 4, p. G279, 2004 -
Effects of Post Dielectric Deposition and Post Metallization Annealing Processes on Metal/Dy2O3/Si(100) Diode Characteristics
Japanese Journal of Applied Physics, vol. 43, no. No. 4B, pp. 1873–1878, 2004 - Proposal of a multi-layer channel MOSFET: the application of selective etching for Si/SiGe stacked layers
Applied Surface Science, vol. 224, no. 1-4, pp. 270–273, 2004 - Composition, chemical structure, and electronic band structure of rare earth oxide/Si(100) interfacial transition layer
Microelectronic Engineering, vol. 72, no. 1-4, pp. 283–287, 2004 - Atomic-scale depth profiling of composition, chemical structure and electronic band structure of La2O3/Si(100) interfacial transition layer
Applied Surface Science, vol. 234, no. 1-4, pp. 493–496, 2004 - Characterization of La[sub 2]O[sub 3] and Yb[sub 2]O[sub 3] Thin Films for High-k Gate Insulator Application
Journal of The Electrochemical Society, vol. 150, no. 7, p. F134, 2003 - Effect of surface treatment of Si substrates and annealing condition on high-k rare earth oxide gate dielectrics
Applied Surface Science, vol. 216, no. 1-4, pp. 302–306, 2003 - Chemical and electronic structures of Lu2O3/Si interfacial transition layer
Applied Surface Science, vol. 216, no. 1-4, pp. 234–238, 2003 - NiSi salicide technology for scaled CMOS
Microelectronic Engineering, vol. 60, no. 1-2, pp. 157–169, 2002 - Silicon integrated circuit technology from past to future
Microelectronics Reliability, vol. 42, no. 4-5, pp. 465–491, 2002 - Epitaxial silicide interfaces in microelectronics
Thin Solid Films, vol. 369, no. 1-2, pp. 233–239, 2000 - Effect of ultrathin Mo and MoSi[sub x] layer on Ti silicide reaction
Journal of Applied Physics, vol. 86, no. 7, p. 3655, 1999 - Silicide formation in co-deposited TiSix layers: The effect of deposition temperature and Mo
Journal of Electronic Materials, vol. 28, no. 10, pp. 1115–1122, 1999 - Electrical properties of ferroelectric BaMgF4 films grown on GaAs substrates using AlGaAs buffer layer
Applied Surface Science, vol. 117-118, pp. 418–422, 1997 - Characterization of ferroelectric BaMgF4 films grown on AlGaAs/GaAs(100) high-electron-mobility transistor structures
Journal of Crystal Growth, vol. 150, pp. 1104–1107, 1995