Fabrication and Performance Test of Fresnel Zone Plate with 35 nm Outermost Zone Width in Hard X-Ray Region
Figure 7
Scanning microscopy images of line and space test patterns. X-ray energy is 8 keV. (a) Bright field image, 50 nm pixel size and 0.2 s dwell time. (b) Dark field image, 12.5 nm pixel size and 0.2 s dwell time. (c) Schematic drawing of line and space patterns. Black area corresponds to tantalum-deposited regions.
