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ISRN Nanotechnology
Volume 2012 (2012), Article ID 453517, 5 pages
doi:10.5402/2012/453517
UV Illumination Room-Temperature ZnO Nanoparticle Ethanol Gas Sensors
Institute of Microelectronics and Department of Electrical Engineering, Center for Micro/Nano Science and Technology, Advanced Optoelectronic Technology Center, National Cheng Kung University, Tainan 70101, Taiwan
Received 10 January 2012; Accepted 9 February 2012
Academic Editors: C. S. Casari, C. Li, and W. Lu
Copyright © 2012 Sheng-Po Chang and Kuan-Yu Chen. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
Abstract
Zinc oxide (ZnO) nanoparticle gas sensor was formed by spin coating. We annealed the film at 400, 600, and C for 1 hour in air to make gas sensor. The responses of gas sensor to ethanol with UV light illumination were investigated. It could be observed that the ZnO nanoparticle film annealing at C has the highest sensitivity. It can be attributed to the defects of ZnO nanoparticle film annealing at C much more than other annealing temperatures. The study shows that the ZnO nanoparticles have potential applications as RT ethanol sensors.