Finite-Time Terminal Sliding Mode Tracking Control for Piezoelectric Actuators

Table 3

Control performance in step tracking.

Performance; (with different amplitudes)	TSMC
	1 𝜇m	2 𝜇m	3 𝜇m	4 𝜇m
1% settling time (ms)	1.40	1.27	1.16	0.87
Overshoot	0.50%	0.55%	0.67%	0.72%