ZnO:Al Grown by Sputtering from Two Different Target Sources: A Comparison Study

<table><svg height="15" id="M22" style="vertical-align:-2.22495pt" version="1.1" viewbox="0 0 32.212502 15" width="32.212502" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink">
<g transform="matrix(.017,0,0,-.017,.062,12.163)"><path d="M475 507q0 -83 -20 -172t-56 -167.5t-93.5 -129t-125.5 -50.5q-157 0 -157 227q0 78 21.5 164t59 161t96.5 123.5t126 48.5q79 0 114 -58t35 -147zM391 522q0 155 -81 155q-62 0 -111 -82.5t-73 -200.5h253q12 81 12 128zM373 346h-255q-12 -91 -12 -150q0 -72 20 -123
t63 -51q34 0 64 28.5t52.5 77t39 103t28.5 115.5z" id="x1D703"></path></g><g transform="matrix(.017,0,0,-.017,8.528,12.163)"><path d="M368 703l-264 -866h-60l265 866h59z" id="x2F"></path></g><g transform="matrix(.017,0,0,-.017,15.531,12.163)"><path d="M412 140l28 -9q0 -2 -35 -131h-373v23q112 112 161 170q59 70 92 127t33 115q0 63 -31 98t-86 35q-75 0 -137 -93l-22 20l57 81q55 59 135 59q69 0 118.5 -46.5t49.5 -122.5q0 -62 -29.5 -114t-102.5 -130l-141 -149h186q42 0 58.5 10.5t38.5 56.5z" id="x32"></path></g><g transform="matrix(.017,0,0,-.017,23.691,12.163)"><path d="M475 507q0 -83 -20 -172t-56 -167.5t-93.5 -129t-125.5 -50.5q-157 0 -157 227q0 78 21.5 164t59 161t96.5 123.5t126 48.5q79 0 114 -58t35 -147zM391 522q0 155 -81 155q-62 0 -111 -82.5t-73 -200.5h253q12 81 12 128zM373 346h-255q-12 -91 -12 -150q0 -72 20 -123
t63 -51q34 0 64 28.5t52.5 77t39 103t28.5 115.5z" id="x1D703"></path></g>
</svg> XRD scans of ZnO:Al films with different thicknesses, grown from ceramic targets.</table>

Advances in Condensed Matter Physics

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Figure 1

Figure 1: ZnO:Al Grown by Sputtering from Two Different Target Sources: A Comparison Study 