Research Article

ZnO:Al Grown by Sputtering from Two Different Target Sources: A Comparison Study

Figure 9

Grazing angle θ/2θ XRD scans taken at different angles for thin films grown from (a) ceramic targets. Film thickness is 1.0 μm (b) powder targets. Film thickness is 1.0 μm.
682125.fig.009a
(a)
682125.fig.009b
(b)