Table 2: Measured electrical properties for ZnO:Al2O3 films grown from ceramic targets.

Thickness (μm)Sheet resistance (Ω/□)Resistivity (Ω·cm)Mobility (cm2/V·s)Carrier concentration (1/cm3)

0.043.75 × 1051.490.4−1.05 × 1019
0.15.71 × 1030.05711.5−7.30 × 1019
1.024.40.002445.46−4.69 × 1020
2.07.150.0014310.3−4.25 × 1020