Table 4:
Measured electrical properties for ZnO:Al
2
O
3
films grown from powder source.
Thickness (
μ
m)
Sheet resistance (Ω/□)
Resistivity (Ω·cm)
Mobility
μ
(cm
2
/V·s)
Carrier concentration
N
(1/cm
3
)
1.0
135
0.0135
7.56
6.12 × 10
19
2.0
48.4
0.00967
3
−2.15 × 10
20