ZnO:Al Grown by Sputtering from Two Different Target Sources: A Comparison Study

Table 4

Measured electrical properties for ZnO:Al₂O₃ films grown from powder source.

Thickness (μm)	Sheet resistance (Ω/□)	Resistivity (Ω·cm)	Mobility μ (cm^2/V·s)	Carrier concentration N (1/cm^3)
1.0	135	0.0135	7.56	6.12 × 10^19
2.0	48.4	0.00967	3	−2.15 × 10^20