Ellipsometric Characterization of Thin Films from Multicomponent Chalcogenide Glasses for Application in Modern Optical Devices

Table 3

Refractive index, 𝑛, and thickness, 𝑑, of thin films, determined by ellipsometric, triple and double spectrophotometric methods. 𝑇 is the transmission, 𝑅_𝑓, 𝑅_𝑏, and 𝑅_𝑚 are the reflections from the front and back side of the BK-7 substrate and from the film deposited on Si-wafer substrate, respectively.

Composition	(T, R, 𝑅𝑚) method		Ellipsometric		(T, 𝑅𝑓) method		Ellipsometric
	d unexp [nm]	d exp [nm]	d unexp [nm]	d exp [nm]	n unexp	n exp	n unexp	n exp
As40S60	74	72	74.0	72.5	2.46	2.58	2.457	2.622
GeS2	48	50	47.0	49.7	2.15	2.11	2.131	2.096
As20Ge20S60	80	85	81.8	86.2	2.35	2.30	2.369	2.280
As10Ge30S60	95	91	93.6	91.5	2.32	2.23	2.336	2.258
As40S30Se30	73	72	74.2	73.7	2.74	2.94	2.722	2.949
As40Se60	70	65	69.3	65.6	3.05	3.31	3.056	3.316