Electrical Properties of Amorphous Titanium Oxide Thin Films for Bolometric Application

<table>Temperature dependence of conductivity <svg height="8.3000002" id="M51" style="vertical-align:-0.1638pt" version="1.1" viewbox="0 0 9.7250004 8.3000002" width="9.7250004" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink">
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</svg> plotted as <svg height="12.4375" id="M52" style="vertical-align:-0.1638pt" version="1.1" viewbox="0 0 26.1625 12.4375" width="26.1625" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink">
<g transform="matrix(.017,-0,0,-.017,.062,12.162)"><path d="M238 0h-223v26q48 5 60 17t12 61v473q0 50 -10.5 60.5t-58.5 15.5v24q73 8 148 35v-608q0 -49 11.5 -61t60.5 -17v-26z" id="x6C"></path></g><g transform="matrix(.017,-0,0,-.017,4.363,12.162)"><path d="M524 0h-209v26q44 5 55 18t11 65v167q0 114 -91 114q-50 0 -109 -51v-235q0 -50 10 -61.5t55 -16.5v-26h-217v26q51 5 62 17t11 61v206q0 47 -9.5 58.5t-50.5 19.5v23q82 15 139 40v-79l67 47q47 30 83 30q60 0 94.5 -40t34.5 -112v-193q0 -50 10 -61.5t54 -16.5v-26z
" id="x6E"></path></g><g transform="matrix(.017,-0,0,-.017,16.483,12.162)"><path d="M548 455q-32 -77 -74 -77q-37 0 -103 10l-3 -2q36 -30 48.5 -62t12.5 -80q0 -103 -75 -179.5t-175 -76.5q-70 0 -113 45t-43 128q0 115 83.5 200.5t209.5 85.5q31 0 77.5 -4t67.5 -4q36 0 62 30zM350 274q0 54 -17 86q-19 35 -57 35q-50 0 -90 -37.5t-59 -91.5t-19 -109
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</svg> versus 10<sup>3</sup>/<svg height="11.6125" id="M53" style="vertical-align:-0.0pt" version="1.1" viewbox="0 0 11.45 11.6125" width="11.45" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink">
<g transform="matrix(.017,-0,0,-.017,.062,11.55)"><path d="M649 676l-22 -187l-33 -2q3 56 -12 94q-8 20 -31.5 26.5t-86.5 6.5h-74l-90 -491q-4 -23 -6 -36.5t1 -25t7 -16.5t18 -9t27 -5t41 -3l-6 -28h-286l4 28q68 5 84 18.5t28 76.5l94 491h-55q-74 0 -100.5 -6t-41.5 -23q-24 -29 -54 -98l-32 1q32 98 53 188h22q7 -18 15 -22
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</svg> in the range between 293 K and 373 K.</table>

Advances in Condensed Matter Physics

fig5

Figure 5

Figure 5: Electrical Properties of Amorphous Titanium Oxide Thin Films for Bolometric Application 