Study of Structure and Electro-Optical Characteristics of Indium Tin Oxide Thin Films

Table 2

Electro-optical parameters of as-deposited and annealed ITO thin films.

Parameter	As-deposited	Annealed
		300°C	600°C
𝑇 (at 550 nm)	89.1%	90.5%	91.7%
𝜔𝑝 (rad/s)	5.51×10^14	8.16×10^14	9.1×10^14
𝑁opt (cm^−3)	9.67×10^19	2.94×10^20	4.12×10^20
𝜀opt	2.89	4.00	4.51
𝜌 (Ω·cm)	3.03×10^−3	4.58×10^−4	2.19×10^−4
𝜇 (cm^2/V·s)	21.33	46.42	69.3
𝐸𝑔 (eV)	3.81	3.88	4
𝐸𝑈 (eV)	0.34	0.31	0.29
𝑅𝑠 (Ω/sq)	152	23	11
𝜙 (Ω^−1)	2.07×10^−3	1.6×10^−2	3.82×10^−2