Effects of the Argon Pressure on the Optical Band Gap of Zinc Oxide Thin Films Grown by Nonreactive RF Sputtering

Table 1

Argon pressure dependence of 2θ values for (002) peaks, crystallite sizes, and deposition rate.

𝑃Ar; (Pa)	2θ (002) peak		Crystallite size (nm)		Deposition rate (Å/min)
	200°C	500°C	200°C	500°C
2.67	34.38	34.41	11.7	14.0	330
5.33	34.33	34.45	12.6	14.4	260
8.00	34.38	34.44	12.2	14.6	130
10.66	34.40	34.42	11.5	13.8	110