Investigation of Control of Residual Stress Induced by CO₂ Laser-Based Damage Mitigation of Fused Silica Optics

Table 1

Residual stress at the location of maximum retardance without or with laser annealing.

	Without annealing	With annealing
Residual stress (MPa)	28<𝜎𝑐<39	𝜎𝑐<17