In and Ga Codoped ZnO Film as a Front Electrode for Thin Film Silicon Solar Cells

Table 1

The ZnO targets with various percentages of Ga and In atoms.

Target		A	B	C	D	E
Impurity	at% In	0	0.1	0.3	0.5	1
	at% Ga	5	4.9	4.7	4.5	4.0