Surface Contaminant Control Technologies to Improve Laser Damage Resistance of Optics

Table 1

Controlling airborne particulate cleanliness in every cleaning room or zone in SG-III laser driver.

Controlled cleaning room or zone	Airborne particulate cleanliness level
Mounting zone	ISO 5
Optics assembly workshop	ISO 5
Precision cleaning building	ISO 6
Gross cleaning workshop	ISO 8
Laser beam tube	ISO 4
Optics/LRU protecting case	ISO 5
Target area, laser hall	ISO 8