Research Article
Application of Ellipsometry to Control the Plasmachemical Synthesis of Thin TiONx Layers
Figure 7
Optical dispersion of refractive index (lines) and light absorption (dash line) in TiONx films of different thickness (different nitridation time) according to the data of Figure 5 for (a) sample number 1, (b) sample number 2, and (c) sample number 3a.
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