Research Article
Application of Ellipsometry to Control the Plasmachemical Synthesis of Thin TiONx Layers
Table 2
Calculation results for two-layered structure.
| , Å | , Å | | |
| 50 | 50 | | | 50 | 20 | 2.5 − 2 | 1.0271 − 4.1815 | 50 | 20 | 2.2776 − 2.7318 | 1.5291 − 2.5012 | 50 | 20 | 1.7903 − 3.1159 | 2.9627 − 2.0428 | 50 | 150 | 2.5 − 2 | 3.6502 − 1.2975 | 50 | 150 | 1.9293 − 0.2837 | 3.3544 − 1.5333 | 50 | 100 | 2.9989 − 1.1472 | 2.7523 − 1.8887 |
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