Research Article
A Self-Consistent Model for Thermal Oxidation of Silicon at Low Oxide Thickness
Table 2
Values of
and
in (
36), calculated from the data in [
6].
is the minimum silicon oxide thickness where (
36) holds.
| Blanc’s series | in nm/s | | Range of validity (in nm) |
| A1 | 0.067 | 0.645 | 4.6 | A2 | 0.071 | 0.659 | 4.5 | A3 | 0.013 | 0.744 | 4.0 | A4 | 0.075 | 0.691 | 10.5 | A5 | 0.341 | 0.569 | 5.5 | A6 | 0.147 | 0.649 | 13.2 | A7 | 0.098 | 0.688 | 5.7 | A8 | 0.078 | 0.682 | 6.6 | A9 | 0.068 | 0.659 | 6.2 | A10 | 0.037 | 0.669 | 6.4 | A11 | 0.020 | 0.782 | 5.2 |
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