Research Article
DC Performance Variations of SOI FinFETs with Different Silicide Thickness
Figure 2
DC performance and variations of the SOI FinFETs with the of (a) 8 and (b) 10 nm at drain voltage () of 0.05 V and (c) 1.0 V. The number of measured devices is 50 for each .
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(b) |
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