An Analytical Theory of Piezoresistive Effects in Hall Plates with Large Contacts

Figure 16

Pseudo-Hall device with two perpendicular mirror-symmetry axes and : inverted Greek cross geometry. It can be used for the measurement of on a chip made of (100)-silicon. The device is supplied with electrical power at the contacts . The output signal is tapped between . The equivalent resistor circuit (ERC) is identical to Figure 6.