An Analytical Theory of Piezoresistive Effects in Hall Plates with Large Contacts

Figure 21

for circular Hall plates of Figure 10(a) versus contact sizes and . This is the piezoresistive influence on the current related magnetic sensitivity of the Hall plate. It vanishes for symmetric devices with and it is strongest for devices, where one contact pair is point-sized and the other contact pair has a half-aperture angle of 62.5°. The plot assumes low n-doped (100)-silicon with . The plot region is not shown due to numerical problems in its evaluation – for ; it holds (see Figure 13) and .