An Analytical Theory of Piezoresistive Effects in Hall Plates with Large Contacts

Figure 8

Sensitivity of output voltage versus mechanical stress (normalized to supply voltage ) for an offset-free device of Figure 6 operated in the same way as in Figure 6. All other components of the stress tensor vanish, as well as . The plot is a graphical representation of (18a)–(18m) in the limit of small stress and with the piezoresistive coefficient for low p-doped silicon. Largest stress sensitivity of 45.674%/GPa is obtained for aspect ratios . There satisfies (20).