Research Article
An Analytical Theory of Piezoresistive Effects in Hall Plates with Large Contacts
Table 2
Mechanical stress sensitivity of a circular device from Figure 10(a): comparison of numerical finite element simulation (FEM) versus analytical theory. is the resistance between the -contacts in Figure 10(a) and is the resistance between the -contacts in Figure 10(a). The mesh of the FEM-simulation had 2.66 million elements and the model used Lagrange multiplier and the piezoresistivity matrix from (6a) to (6c) with , , and . The theory used (18d), (18e), (18g), (18h), (18i), (28b), (28c), and (26b) for . For we swapped with in (28b) and (28c) and with , and we replaced in (26b).
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