Fuzzy TOPSIS for Multiresponse Quality Problems in Wafer Fabrication Processes

Table 2

Fuzzy weights for each quality response.

Response	Fuzzy weight
Defect number	𝑤^∼1 = (0.8286, 0.8052, 0.8081)
Density	𝑤^∼2 = (0.0460, 0.0520, 0.0511)
Deposition rate	𝑤^∼3 = (0.1254, 0.1428, 0.1408)