Fuzzy TOPSIS for Multiresponse Quality Problems in Wafer Fabrication Processes

Table 4

Positive and negative ideal solutions for each quality response.

Quality response	Positive ideal solution (𝐴^∼+)	Negative ideal solution (𝐴^∼−)
Deposition rate	𝐴^∼+=(0.1249, 0.1425, 0.1408)	𝐴^∼−=(0.0156, 0.0179, 0.0180)
Defect number	𝐴^∼+=(0.0000, 0.0000, 0.0002)	𝐴^∼−=(0.2532, 0.2908, 0.8081)
Density	𝐴^∼+=(0.0273, 0.0308, 0.0303)	𝐴^∼−=(0.0448, 0.0506, 0.0511), if 𝑣^∼𝑖2>(0.0273, 0.0308, 0.0303)
		𝐴^∼−=(0.0147, 0.0167, 0.0167), if 𝑣^∼𝑖2<(0.0273, 0.0308, 0.0303)