About this Journal Submit a Manuscript Table of Contents
Advances in Mechanical Engineering
Volume 2012 (2012), Article ID 962439, 11 pages
http://dx.doi.org/10.1155/2012/962439
Research Article

Pure Nano-Rotation Scanner

1Department of Mechanical Engineering, Dong-A University, Busan 604-714, Republic of Korea
2School of Mechanical Engineering, Yeungnam University, Gyeongsan 712-749, Republic of Korea
3Department of Mechanical System Engineering, Chonbuk National University, Jeonju-si 561-756, Republic of Korea

Received 10 July 2012; Accepted 7 August 2012

Academic Editor: Mehdi Ahmadian

Copyright © 2012 Moo-Yeon Lee et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

Abstract

We developed and tested a novel rotation scanner for nano resolution and accurate rotary motion about the rotation center. The scanner consists of circular hinges and leaf springs so that the parasitic error at the center of the scanner in the X and Y directions is minimized, and rotation performance is optimized. Each sector of the scanner’s system was devised to have nano resolution by minimizing the parasitic errors of the rotation center that arise due to displacements other than rotation. The analytic optimal design results of the proposed scanner were verified using finite element analyses. The piezoelectric actuators were used to attain nano-resolution performances, and a capacitive sensor was used to measure displacement. A feedback controller was used to minimize the rotation errors in the rotation scanner system under practical conditions. Finally, the performance evaluation test results showed that the resonance frequency was 542 Hz, the resolution was 0.09 μrad, and the rotation displacement was 497.2 μrad. Our test results revealed that the rotation scanner exhibited accurate rotation about the center of the scanner and had good nano precision.