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Advances in Mechanical Engineering
Volume 2012 (2012), Article ID 962439, 11 pages
http://dx.doi.org/10.1155/2012/962439
Research Article

Pure Nano-Rotation Scanner

1Department of Mechanical Engineering, Dong-A University, Busan 604-714, Republic of Korea
2School of Mechanical Engineering, Yeungnam University, Gyeongsan 712-749, Republic of Korea
3Department of Mechanical System Engineering, Chonbuk National University, Jeonju-si 561-756, Republic of Korea

Received 10 July 2012; Accepted 7 August 2012

Academic Editor: Mehdi Ahmadian

Copyright © 2012 Moo-Yeon Lee et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

Linked References

  1. S. H. Chang and S. S. Li, “A high resolution long travel friction-drive micropositioner with programmable step size,” Review of Scientific Instruments, vol. 70, no. 6, pp. 2776–2782, 1999. View at Scopus
  2. S. H. Chang and B. C. Du, “A precision piezodriven micropositioner mechanism with large travel range,” Review of Scientific Instruments, vol. 69, no. 4, pp. 1785–1791, 1998. View at Scopus
  3. Y. Tian, B. Shirinzadeh, D. Zhang, and G. Alici, “Development and dynamic modelling of a flexure-based Scott-Russell mechanism for nano-manipulation,” Mechanical Systems and Signal Processing, vol. 23, no. 3, pp. 957–978, 2009. View at Publisher · View at Google Scholar · View at Scopus
  4. D. Kang, K. Kim, D. Kim, J. Shim, D.-G. Gweon, and J. Jeong, “Optimal design of high precision XY-scanner with nanometer-level resolution and millimeter-level working range,” Mechatronics, vol. 19, no. 4, pp. 562–570, 2009. View at Publisher · View at Google Scholar · View at Scopus
  5. D.-Y. Lee, D.-M. Kim, and D.-G. Gweon, “Design and evaluation of two dimensional metrological atomic force microscope using a planar nanoscanner,” Japanese Journal of Applied Physics 1, vol. 45, no. 3, pp. 2124–2127, 2006. View at Publisher · View at Google Scholar · View at Scopus
  6. Q. Yao, J. Dong, and P. M. Ferreira, “A novel parallel-kinematics mechanisms for integrated, multi-axis nanopositioning. Part 1. Kinematics and design for fabrication,” Precision Engineering, vol. 32, no. 1, pp. 7–19, 2008. View at Publisher · View at Google Scholar · View at Scopus
  7. Y. Wu and Z. Zhou, “An XYθ mechanism actuated by one actuator,” Mechanism and Machine Theory, vol. 39, no. 10, pp. 1101–1110, 2004. View at Publisher · View at Google Scholar · View at Scopus
  8. Y.-M. Choi, J. J. Kim, J. Kim, and D.-G. Gweon, “Design and control of a nanoprecision XYΘ scanner,” Review of Scientific Instruments, vol. 79, no. 4, Article ID 045109, 7 pages, 2008. View at Publisher · View at Google Scholar · View at Scopus
  9. W. Dong, J. Tang, and Y. ElDeeb, “Design of a linear-motion dual-stage actuation system for precision control,” Smart Materials and Structures, vol. 18, Article ID 095035, 11 pages, 2009.
  10. K.-B. Choi and D.-H. Kim, “Monolithic parallel linear compliant mechanism for two axes ultraprecision linear motion,” Review of Scientific Instruments, vol. 77, no. 6, Article ID 065106, 7 pages, 2006. View at Publisher · View at Google Scholar · View at Scopus
  11. T. Chang and X. Sun, “Analysis and control of monolithic piezoelectric nano-actuator,” IEEE Transactions on Control Systems Technology, vol. 9, no. 1, pp. 69–75, 2001. View at Publisher · View at Google Scholar · View at Scopus
  12. S. H. Chang, C. K. Tseng, and H. C. Chien, “An ultra-precision XYθZ piezo-micropositioner part II: experiment and performance,” IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, vol. 46, no. 4, pp. 906–912, 1999. View at Scopus
  13. F.-Z. Hsiao and T.-W. Lin, “Analysis of a novel flexure hinge with three degrees of freedom,” Review of Scientific Instruments, vol. 72, no. 2, pp. 1565–1573, 2001. View at Publisher · View at Google Scholar · View at Scopus
  14. D.-Y. Lee and M.-Y. Lee, “A flexure guided planar scanner for scanning probe microscope; part1: design and analysis of static and dynamic properties,” Transactions of the KSNVE, vol. 15, pp. 667–673, 2005, In Korean.
  15. S. Salapaka, A. Sebastian, J. P. Cleveland, and M. V. Salapaka, “High bandwidth nano-positioner: a robust control approach,” Review of Scientific Instruments, vol. 73, no. 9, pp. 3232–3241, 2002. View at Publisher · View at Google Scholar · View at Scopus