Table 1: Comparison of theoretical and FEA results (diameter of circular hinge = 10 mm, neck thickness of circular hinge = 0.48 mm, length of L-shaped flexure leaf spring = 10 mm, thickness of L-shaped flexure leaf spring = 0.4 mm).

Stiffness (N/m)DirectionTheoryFEAError (%)

StiffnessCircular hingex
y
L-shaped flexure leaf springx
y
Total systemx
y
(Hz)