Pure Nano-Rotation Scanner : Table 1

Table 1: Comparison of theoretical and FEA results (diameter of circular hinge = 10 mm, neck thickness of circular hinge = 0.48 mm, length of L-shaped flexure leaf spring = 10 mm, thickness of L-shaped flexure leaf spring = 0.4 mm).


	Stiffness (N/m)	Direction	Theory	FEA	Error (%)

Stiffness	Circular hinge	x
		y

	L-shaped flexure leaf spring	x
	L-shaped flexure leaf spring	y
	Total system	x
		y

	(Hz)