Table 6: Specifications for the experimental components.

ComponentSpecifications

Passive vibration isolation tableOrifice damping isolation

PZT actuator
(PZS001, NEC-TOKIN)
Drive voltage: 150 V
Displacement: 17.4 μm ± 2 μm
Resonant frequency: 69 kHz

PZT actuator controller
(TPZ001, NEC-TOKIN)
Drive voltage: 0–150 V
Drive current: 7.5 mA max. Continuous
Noise: <2 mV RMS

PZT strain gauge reader
(TSG001, NEC-TOKIN)
Sampling bandwidth: 500 Hz
Reading resolution: 1 nm
Excitation frequency: 18 kHz

Strain gauge preamp
(AMP002, NEC-TOKIN)
Drive voltage: 150 V
Displacement: 17.4 μm ± 2 μm
Bridge arm resistance: 350 Ω
Gauge factor: 2 ± 2%

Capacitive sensor
(Probe model 2812, EDE TECH)
Output range: ±25 μm
Output voltage: ±10 V
Bandwidth: 1 kHz
Noise: 0.109 mV (0.272 nm) RMS

Analog input module
(DAQ 9215, NI)
Signal type: voltage
Resolution: 16 bit
Max sampling rate: 100 kS/s
Signal input range: ±10 V