Research Article
Deposition and Tribological Properties of Sulfur-Doped DLC Films Deposited by PBII Method
Table 3
Internal stress values of S-DLC films as a function of bias voltages and C/S flow-rate ratios.
| Sample no. | Bias voltages (kV) | C/S flow-rate ratios | Internal stress (GPa) |
| S-DLC 1 | 0 | 2 : 1 | 1.10 | S-DLC 2 | 0 | 1 : 1 | 1.03 | S-DLC 3 | 0 | 1 : 2 | 1.05 | S-DLC 4 | 5 | 2 : 1 | 0.93 | S-DLC 5 | 5 | 1 : 1 | 0.79 | S-DLC 6 | 5 | 1 : 2 | 0.40 |
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