Young's Modulus and Coefficient of Linear Thermal Expansion of ZnO Conductive and Transparent Ultra-Thin Films
Figure 10
Young's modulus in the in-plane direction (a-axis of Wurtzite cell) of the GZO film formed by the RPD system as a function of film thickness. (a) Young's modulus before heat-cycle testing (as-deposited). (b) Reduction in Young's modulus value of the thin film caused by the heat-cycle testing. The same data in (a) is redrawn in (b).
