Young's Modulus and Coefficient of Linear Thermal Expansion of ZnO Conductive and Transparent Ultra-Thin Films

<table>Dependence of residual stress in the GZO film formed by the RPD system on the film thickness before heat treatment. The symbols denote measured data. The dots (a) and open (b) circles correspond to the 1st and 2nd experimental series of GZO films respectively, and the triangles (c) show the residual stress in ZnO films without Ga (3rd series). The films in the 1st and 3rd series were formed on Si wafers with thermally oxidized silicon layer films.</table>

Advances in Materials Science and Engineering

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Figure 2

Figure 2: Young's Modulus and Coefficient of Linear Thermal Expansion of ZnO Conductive and Transparent Ultra-Thin Films 