Young's Modulus and Coefficient of Linear Thermal Expansion of ZnO Conductive and Transparent Ultra-Thin Films
Figure 5
Residual stress behavior during heat-cycle testing (room-temperature: −500°C) in an atmosphere of flowing Ar gas for GZO films formed by the magnetron sputtering system. The columns (a) and (b) correspond to changes in the residual stress during heat-cycle testing, respectively.
