High Spatial Resolution Time-of-Flight Secondary Ion Mass Spectrometry for the Masses: A Novel Orthogonal ToF FIB-SIMS Instrument with <i>In Situ</i> AFM

<table>A closer look at the mass analyser in position on the back of the chamber; there is very little space available. The turbo pump on the mass analyser (to protect the detector) will be replaced by an ion pump. The pulser electronics for the orthogonal extraction are placed close to the mass analyser in order to preserve the pulse shape.</table>

Advances in Materials Science and Engineering

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Figure 1

Figure 1: High Spatial Resolution Time-of-Flight Secondary Ion Mass Spectrometry for the Masses: A Novel Orthogonal ToF FIB-SIMS Instrument with <i>In Situ</i> AFM 

Figure 1 | High Spatial Resolution Time-of-Flight Secondary Ion Mass Spectrometry for the Masses: A Novel Orthogonal ToF FIB-SIMS Instrument with In Situ AFM 