High Spatial Resolution Time-of-Flight Secondary Ion Mass Spectrometry for the Masses: A Novel Orthogonal ToF FIB-SIMS Instrument with <i>In Situ</i> AFM

<table>Enlargement of part of the profile from Figure <a href="../fig9/">9</a> showing a superimposed fit of a complementary error function and the 20% and 80% points. The inferred spot size for the FIB beam (and so the spatial resolution of the SIMS signal) is between 40 and 50 nm for this dataset.</table>

Advances in Materials Science and Engineering

fig11

Figure 11

Figure 11: High Spatial Resolution Time-of-Flight Secondary Ion Mass Spectrometry for the Masses: A Novel Orthogonal ToF FIB-SIMS Instrument with <i>In Situ</i> AFM 

Figure 11 | High Spatial Resolution Time-of-Flight Secondary Ion Mass Spectrometry for the Masses: A Novel Orthogonal ToF FIB-SIMS Instrument with In Situ AFM 