Research Article

High Spatial Resolution Time-of-Flight Secondary Ion Mass Spectrometry for the Masses: A Novel Orthogonal ToF FIB-SIMS Instrument with In Situ AFM

Figure 14

Overlay of depth profiles of aluminium and oxygen for VECSEL 3/1. Note the oxygen peak at frame 60, close to the interface between the two wafers. The smooth drop in the aluminium signals (not evident in Figure 12) was later discovered to be due to a temporary contamination of the ion optics.
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