High Spatial Resolution Time-of-Flight Secondary Ion Mass Spectrometry for the Masses: A Novel Orthogonal ToF FIB-SIMS Instrument with In Situ AFM

Figure 16

SEM image of the nominal 20 nm/20 nm zinc oxide/aluminium oxide multilayer sample for which SIMS results are shown in Figure 15. The bright stripes are the zinc oxide layers, the dark stripes are the aluminium oxide layers, and the substrate is silicon. It can be seen that the zinc oxide layers are thinner than the aluminium oxide layers.