High Spatial Resolution Time-of-Flight Secondary Ion Mass Spectrometry for the Masses: A Novel Orthogonal ToF FIB-SIMS Instrument with In Situ AFM

Figure 19

5 × 5 μm SPM scan from within an FIB/SIMS crater after 200 10 × 10 micron frames at 104 pA and 20 kV Ga⁺. The RMS roughness is 4.9 nm. The dataset has been corrected for global tilt. For a higher primary beam current of 401 pA (similar to that used for the depth profiles and images shown above) RMS roughnesses of between 1 and 6 nm were measured.