Research Article

High Spatial Resolution Time-of-Flight Secondary Ion Mass Spectrometry for the Masses: A Novel Orthogonal ToF FIB-SIMS Instrument with In Situ AFM

Figure 2

Interior of FIB/SEM-SIMS prototype. The sample stage has been lowered to make the arrangement of the collection lens and charged particle columns clearer. For SIMS work, the sample is usually positioned at a working distance of 9 mm below the SEM column, and tilted to 55° to present the sample surface normal to the incident gallium ions. Additional instrumentation such as nanomanipulators, gas injection systems, and EDX or BSE detectors can be added as required. For SPM measurements, the SPM assembly was mounted on the sample stage.
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