Research Article
Isothermal and Two-Temperature Zone Selenization of Mo Layers
Table 1
Partial pressure (atm.) of different Se molecules in vapor phase of Se [
7].
| | T, K | T, °C | ∑Pse, atm. | Se2 | Se3 | Se5 | Se6 | Se7 | Se8 |
| | 650 | 377 | 2.46 ×10−3 | 5.54 × 10−4 | 1.32 × 10−5 | 1.32 × 10−3 | 3.89 × 10−4 | 1.55 × 10−4 | 2.75 × 10−5 | | Partial pressure (%) | 100 | 22.5 | 0.54 | 53.66 | 15.8 | 6.3 | 1.1 | | 800 | 527 | 9.2 × 10−2 | 2.35 × 10−2 | 1.26 × 10−4 | 5.76 × 10−2 | 6.92 × 10−3 | 3.23 × 10−3 | 5.88 × 10−4 | | Partial pressure (%) | 100 | 25.54 | 0.14 | 62.61 | 7.52 | 3.51 | 0.64 |
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