Preparation and Properties of Ag-Containing Diamond-Like Carbon Films by Magnetron Plasma Source Ion Implantation

Table 1

Raman spectroscopy data of Ag-DLC films with various amounts of silver.

Sample No.	C2H2 flow rate	Deposition rate (nm/min)	Ag concentration (at.%)	G band peak (cm^−1)	FWHM (cm^−1)	𝐼D/𝐼G
1	2.10	39.5	61.3	1578.6	111.0	2.05
2	1.75	15.3	32.5	1588.2	115.0	2.26
3	2.80	13.2	13.4	1584.0	113.1	2.39
4	3.15	9.4	5.9	1566.3	129.7	2.23
5	3.50	13.4	4.5	1555.5	144.9	1.83
6	3.50	16.0	1.8	1557.0	151.8	1.56
7	5.60	21.6	0	1553.6	153.6	1.59