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Advances in Materials Science and Engineering
Volume 2012 (2012), Article ID 592485, 5 pages
Research Article

Structural and Phase Transformations in Water-Vapour-Plasma-Treated Hydrophilic TiO2 Films

Physics Department, Vytautas Magnus University, Vileikos Street 8, 44404, Kaunas, Lithuania

Received 23 March 2012; Revised 2 July 2012; Accepted 7 July 2012

Academic Editor: Markku Leskela

Copyright © 2012 L. Pranevicius et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.


We have investigated structural and phase transformations in water-vapor-plasma-treated 200–300 nm thick Ti films, maintained at room temperature, by injecting water vapor into radio frequency (RF) plasma at different processing powers. Scanning electron microscopy (SEM) combined with optical microscopy and surface nanotopography analysis were used to view tracks of adsorbed water layers and to detect bulges or blisters appeared on the surface of treated samples. Rough surfaces with different size of holes (5–20 μm) through the entire film thickness have been observed. X-ray diffraction results show that the oxidation rate of Ti film drastically increases in the presence of an adsorbed water on the hydrophilic layer. It is assumed that the defining factor which controls oxidation kinetics is the hydroxyl radicals formation.