Effect of the Substrate Movement on the Optical Properties of ZnO Thin Films Deposited by Ultrasonic Spray Pyrolysis

Table 2

Structural parameters of ZnO thin films labelled as ZO1 for linear moved, ZO2 for fixed, and ZO3 for rotated substrate; XRD results; diffraction angle 2𝜃 and FWHM for (002) peak, crystallinite size 𝐷, lattice parameters, and strain along 𝑐-axis 𝜀_𝑧𝑧 and Raman results; 𝐸₂ phonon mode.

Sample	2𝜃	FWHM	𝐷	𝑐	𝑎	𝜀𝑧𝑧	𝐸2
	(degree)	(degree)	(nm)	(Å)	(Å)	(%)	(cm^−1)
ZO1	34.483	0.23539	36.91	5.19772	3.24612	−0.171	439.73
ZO2	34.524	0.26269	33.08	5.19158	3.24006	−0.289	439.39
ZO3	34.494	0.26623	32.63	5.19596	3.24393	−0.204	439.44