Purity of Ion Beams: Analysis and Simulation of Mass Spectra and Mass Interferences in Ion Implantation

<table>Mass spectrum module 1 of ENCOTION. The simulated spectra show an interference between Ge and W ions.</table>

Advances in Materials Science and Engineering

Figure 9: Purity of Ion Beams: Analysis and Simulation of Mass Spectra and Mass Interferences in Ion Implantation 