Purity of Ion Beams: Analysis and Simulation of Mass Spectra and Mass Interferences in Ion Implantation

Table 1

Comparison of As peaks from Figure 3 with calculated apparent masses. Spectrum (a) charge exchange after extraction, spectrum and (b) charge exchange at the extraction electrode 𝑉_𝑠𝑝=1.6 kV.

Mechanism	𝑉ex (kV)	𝑚app (u)
		Spectrum (a)	Equation (5)	Spectrum (b)	Equation (4)
As^+++→As^++	20.2	56.21	56.19	57.79	57.68
	25.1	56.20	56.19	57.41	57.39
	30.1	56.20	56.19	57.17	57.19
As3^+→As3^++	20.2	56.21	56.19	n. d.	51.74
	25.1	56.20	56.19	n. d.	52.61
	30.1	56.20	56.19	n. d.	53.20