Purity of Ion Beams: Analysis and Simulation of Mass Spectra and Mass Interferences in Ion Implantation

Table 2

Simulated transport mechanisms for Al to be coimplanted during a ¹¹𝐵⁺-implantation. The energy 𝐸₁ results from an extraction voltage of 70 kV + 70 kV, and the energy 𝐸₂ from an extraction voltage and an additional acceleration voltage after mass separation of 70 kV each (cf. Figure 8).

Mechanism	𝑚app (u)	𝐸1 (keV)	𝐸2 (keV)
Al2O3^+→Al2O3^+++	11.329	18.5	74.1
AlF2^+→Al^+	11.204	29.1	99.1