Mechanical and Structural Properties of Fluorine-Ion-Implanted Boron Suboxide
Figure 2
A depiction of SEM images measured on the surface of (a) an unimplanted B6O specimen, ((b) and (c)) a F+ ions/cm2 implanted B6O specimen showing clusters of particles embedded in the samples synthesized by fluorine-ion-beam implantation, and (d) an EDX measured pattern on one such ion-beam-synthesized cluster which is highlighted in micrograph (c).
